By Robert A. Dorey
The MEMS (Micro Electro-Mechanical platforms) industry again to progress in 2010. the whole MEMS marketplace is worthy approximately $6.5 billion, up greater than eleven percentage from final 12 months and approximately as excessive as its historical height in 2007. MEMS units are used throughout sectors as diversified as car, aerospace, clinical, business method keep watch over, instrumentation and telecommunications – forming the nerve middle of goods together with airbag crash sensors, strain sensors, biosensors and ink jet printer heads. a part of the MEMS cluster in the Micro & Nano applied sciences Series, this ebook covers the fabrication ideas and purposes of thick movie piezoelectric micro electromechanical structures (MEMS). It contains examples of functions the place the piezoelectric thick movies were used, illustrating how the fabrication technique pertains to the homes and function of the ensuing equipment. different themes contain: top-down and bottom-up fabrication of thick movie MEMS, integration of thick motion pictures with different fabrics, influence of microstructure on houses, gadget functionality, etc.
- Provides unique tips at the fabrication strategies and purposes of thick movie MEMS, for engineers and R&D groups
- Written by means of a unmarried writer, this booklet presents a transparent, coherently written advisor to this significant rising technology
- Covers fabrics, fabrication and functions in a single book
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Additional info for Ceramic Thick Films for MEMS and Microdevices (Micro and Nano Technologies)
Ceramic Thick Films for MEMS and Microdevices (Micro and Nano Technologies) by Robert A. Dorey